论文信息 - A new and simple variable-angle accessory for infrared specular reflectance

A new and simple variable-angle accessory for infrared specular reflectance

A simple, low-cost accessory (patent pending) with only two flat mirrors and a new variable-angle mechanism has been developed for infrared specular reflectance measurements. The system allows the angles of incidence to be varied continuously from 15° (near normal incidence) to 85° (near grazing angle) without losing the alignment of the accessory. The reflectivity of boron nitride thin films deposited on metallic substrates has been measured at different angles of incidence to demonstrate the utility of this accessory.

[1] Enric Bertran,et al. Plasma-enhanced chemical vapor deposition of boron nitride thin films from B2H6–H2–NH3 and B2H6–N2 gas mixtures , 1998 .

[2] N. Mestres,et al. Compositional characterization of a-SiC:H films by infra-red spectroscopy , 1998 .

[3] N. Mestres,et al. Optical study of boron nitride thin films prepared by plasma-enhanced chemical vapor deposition , 1997 .

[4] Yoshihiro Kobayashi,et al. Angle-variable infrared external reflection spectroscopy in UHV and its application to the observation of SiH vibrations on Si(001) substrates with a buried metal layer , 1996 .

[5] Mártin,et al. Off-normal-incidence effects in the infrared-reflectivity spectra of aluminum phosphate. , 1989, Physical review. B, Condensed matter.