Cold-developed electron-beam-patterned ZEP 7000 for fabrication of 13 nm nickel zone plates
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Hans M. Hertz | Anders Holmberg | Michael Bertilson | Magnus Lindblom | H. Hertz | M. Lindblom | A. Holmberg | J. Reinspach | Julia Reinspach | Olov von Hofsten | M. Bertilson | O. V. Hofsten
[1] Chris Jacobsen,et al. Process optimization for production of sub-20 nm soft x-ray zone plates , 1997 .
[2] M. Peuker,et al. High-efficiency nickel phase zone plates with 20 nm minimum outermost zone width , 2001 .
[3] L. Ocola,et al. Effect of cold development on improvement in electron-beam nanopatterning resolution and line roughness , 2006 .
[4] B. Bunday,et al. Low temperature ZEP-520A development process for enhanced critical dimension realization in reactive ion etch etched polysilicon , 2007 .
[5] E. Anderson,et al. Soft x-ray imaging of spin dynamics at high spatial and temporal resolution , 2007 .
[6] K. Sarveswaran,et al. Sub-10 nm electron beam lithography using cold development of poly(methylmethacrylate) , 2004 .
[7] R. Rosenfeld. Nature , 2009, Otolaryngology--head and neck surgery : official journal of American Academy of Otolaryngology-Head and Neck Surgery.
[8] Bryan M. Cord,et al. Optimal temperature for development of poly(methylmethacrylate) , 2007 .
[9] Hans M. Hertz,et al. Nano-fabrication of condenser and micro-zone plates for compact X-ray microscopy , 2004 .
[10] D. Attwood. Soft X-Rays and Extreme Ultraviolet Radiation , 1999 .
[11] I. McNulty,et al. Microscopy and spectroscopy with X-rays for studies in the environmental sciences , 2008, Mineralogical Magazine.
[12] P. Fischer. Studying Nanoscale Magnetism and Its Dynamics With Soft X-Ray Microscopy , 2008, IEEE Transactions on Magnetics.
[13] C. David,et al. Zone-doubling technique to produce ultrahigh-resolution x-ray optics. , 2007, Physical review letters.
[14] U. Vogt,et al. Laboratory arrangement for soft x-ray zone plate efficiency measurements. , 2007, The Review of scientific instruments.
[15] W. Meyer-Ilse,et al. Imaging of humic substance macromolecular structures in water and soils , 1999, Science.
[16] H. Hertz,et al. High-aspect-ratio germanium zone plates fabricated by reactive ion etching in chlorine , 2009 .
[17] E. Anderson,et al. Soft X-ray microscopy at a spatial resolution better than 15 nm , 2005, Nature.
[18] Janos Kirz,et al. Phase zone plates for x rays and the extreme uv , 1974 .
[19] Gerry McDermott,et al. Quantitative 3-D imaging of eukaryotic cells using soft X-ray tomography. , 2008, Journal of structural biology.
[20] H. Massey,et al. PURE AND APPLIED PHYSICS , 1983 .