论文信息 - Electrical activities of stacking faults and partial dislocations in 4H-SiC homoepitaxial films - 字舞流文

Electrical activities of stacking faults and partial dislocations in 4H-SiC homoepitaxial films

Bin Chen | T. Sekiguchi | Jun Chen | F. Fabbri | H. Okumura | T. Ohyanagi | H. Matsuhata | A. Kinoshita