论文信息 - Hydrogenated amorphous silicon deposited at very high growth rates by an expanding Ar-H2-SiH4 plasma - 字舞流文

Hydrogenated amorphous silicon deposited at very high growth rates by an expanding Ar-H2-SiH4 plasma

Ba Bas Korevaar | Rj René Severens | Ahm Arno Smets | W. Kessels | Van de Sanden | D. Schram | G. Adriaenssens | B. Korevaar