Parameter estimation from nonlinear frequency response of MEMS resonators
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Jérôme Juillard | Laurent Bourgois | A. Brenes | F. Vinci dos Santos | J. Juillard | A. Brenes | L. Bourgois | F. V. D. Santos
[1] Olivier Lefort,et al. A new micromachined silicon high-accuracy pressure sensor , 1995 .
[2] A. Brenes,et al. Characterization of MEMS resonators via feedthrough de-embedding of harmonic and subharmonic pulsed-mode response , 2015 .
[3] J. Juillard,et al. Electrostatically-induced modal crosstalk phenomena in resonant MEMS sensors , 2014, 2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP).
[4] W. Davis,et al. Measuring Quality Factor From a Nonlinear Frequency Response With Jump Discontinuities , 2011, Journal of Microelectromechanical Systems.
[5] Z. Zeng,et al. An energy-efficient readout circuit for resonant sensors based on ring-down measurement. , 2013, The Review of scientific instruments.
[6] J Juillard,et al. Modeling of Micromachined Beams Subject to Nonlinear Restoring or Damping Forces , 2011, Journal of Microelectromechanical Systems.
[7] Arthur Gelb,et al. Multiple-Input Describing Functions and Nonlinear System Design , 1968 .
[8] Robert Puers,et al. Creep as a reliability problem in MEMS , 2004, Microelectron. Reliab..
[9] Ron Lifshitz,et al. Nonlinear Dynamics of Nanomechanical and Micromechanical Resonators , 2009 .
[10] Balakumar Balachandran,et al. Parametric identification of piezoelectric microscale resonators , 2006 .
[11] Mitsuhiro Shikida,et al. Tensile-mode fatigue testing of silicon films as structural materials for MEMS , 2001 .
[12] Michael Hietschold,et al. Parasitic charging of dielectric surfaces in capacitive microelectromechanical systems (MEMS) , 1998 .
[13] J. Juillard,et al. Characterization of capacitive MEMS resonators via nonlinear open-loop frequency responses , 2015, 2015 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP).