Handbook of Surface and Nanometrology

Introduction-Surface and Nanometrology General Surface Metrology Background to Surface Metrology Nanometrology Book Structure Characterization The Nature of Surfaces Surface Geometry Assessment and Parameters Characterization Waviness Errors of Form Characterization of Structured and Free Form Surfaces Characterization of Defects on the Surface Discussion Processing, Operations, and Simulations Digital Methods Discrete (Digital) Properties of Random Surfaces Digital Form of Statistical Analysis Parameters Digital Estimation of References for Surface Metrology Algorithms and Mathematical Techniques Basic Concepts in Linear Programming Fourier Transforms and the Fast Fourier Transform Transformations in Surface Metrology Space-Frequency Functions Surface Generation Atomistic Considerations and Simulations Summary Measurement Techniques Background Measurement Systems Stylus-Micro Measuring Instruments Stylus-Nano/Atomic Scale Optical Techniques Capacitance and Other Techniques Electron Microscopy, Photon Microscopy, Raman Spectrometry Comparison of Techniques-General Summary Some Design Considerations Standardization-Traceability-Uncertainty Introduction Nature of Errors Basic Error Theory Propagation of Errors Statistical Tests for Surface Metrology Uncertainty in Instruments-Calibration in General The Calibration of Stylus and Other Instruments Calibration of Form Instruments Variability of Surface Parameters Gps System-International and National Standards Specification for CAD and on Drawings Summary Surfaces and Manufacture Introduction Manufacturing Processes Cutting Abrasive Processes Unconventional Processes Forming Processes Effect of Scale of Size in Manufacture: Macro to Nano to Atomic Processes Structured Surface Manufacture Manufacture of Free-Form Surfaces Mathematical Processing of Manufacture-Finite Element Analysis (Fe), Md, Nurbs The Subsurface and the Interface Surface Integrity Surface Geometry-A Fingerprint of Manufacture Surface Finish Effects in Manufacture of Microchip Electronic Components Discussion and Conclusions Surface Geometry and Its Importance in Function Introduction Two-Body Interaction-The Static Situation Macro to Nanoscale, Contact, Adhesion Corrosion Two-Body Interactions-Dynamic Behavior Macro to Nanoscale, Friction, Wear, Lubrication One-Body Interactions- Optical Scatter, Diffraction System Function Multi-Surfaces Assembly Discussion Conclusions Surface Geometry, Scale of Size Effects, Nanometrology Introduction Effect of Scale of Size on Surface Geometry Scale of Size, Surface Geometry, and Function Scale of Size and Surfaces in Manufacture Nano Instrumentation Operation and Design Considerations Standards, Traceability, and Uncertainty at the Nanoscale Measurement of Typical Nanofeatures Measuring Length to Nanoscale with Interferometers and Other Devices Nano Geometry in Macro Situations Discussion and Conclusions General Comments Introduction Characterization Processing, Operations, and Simulations Measurement Techniques Traceability Standardization Uncertainty Surfaces and Manufacture Surface Geometry and Performance Nanometrology Overview Glossary Index References appear at the end of each chapter.