Assembly for micromechanics and LIGA

Micromechanical structures must be assembled where monolithic integration is not feasible because of incompatible processes, complex geometries or different materials involved. In this way, a system can be built up of products from various suppliers, which may promote the development of a market for microsystems. In micromechanics, assembly must establish mechanical and fluidic contacts in addition to electrical connections. Assembling single components is relatively expensive. This problem may be overcome if batch processes are conducted. A batch process for LIGA structures was developed which has been used to make microfluidic components by transferring a diaphragm to microstructures.

[1]  W. Menz,et al.  Microfluidic components in LIGA technique , 1994 .

[2]  T. Christenson,et al.  A first functional current excited planar rotational magnetic micromotor , 1993, [1993] Proceedings IEEE Micro Electro Mechanical Systems.

[3]  George Wallis.  Field Assisted Glass Sealing , 1975 .

[4]  V. Gass,et al.  Nanofluid handling by micro-flow-sensor based on drag force measurements , 1993, [1993] Proceedings IEEE Micro Electro Mechanical Systems.

[5]  P. Bergveld,et al.  Polymer bonding of micro-machined silicon structures , 1992, [1992] Proceedings IEEE Micro Electro Mechanical Systems.

[6]  Yu-Chong Tai,et al.  Integrated movable micromechanical structures for sensors and actuators , 1988 .

[7]  G.-A. Racine,et al.  Hybrid ultrasonic micromachined motors , 1993, [1993] Proceedings IEEE Micro Electro Mechanical Systems.

[8]  J. Fluitman,et al.  Integrated micro-liquid dosing system , 1991, [1993] Proceedings IEEE Micro Electro Mechanical Systems.

[9]  Werner Karl Schomburg,et al.  A microvalve system fabricated by thermoplastic molding , 1995 .

[10]  T. Christenson,et al.  Metal micromechanisms via deep X-ray lithography, electroplating and assembly , 1992 .

[11]  Shuichi Shoji,et al.  Prototype miniature blood gas analyser fabricated on a silicon wafer , 1988 .

[12]  G. Wallis,et al.  Field Assisted Glass‐Metal Sealing , 1969 .

[13]  W. Bacher,et al.  Micropump manufactured by thermoplastic molding , 1994, Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems.

[14]  Albert van den Berg,et al.  A silicon integrated miniature chemical analysis system , 1992 .

[15]  P. Bley,et al.  TI- and BE-X-ray masks with alignment windows for the LIGA process , 1991 .

[16]  J. Fluitman,et al.  A thermopneumatic micropump based on micro-engineering techniques , 1990 .

[17]  Henrik Jakobsen,et al.  Silicon-to-thin film anodic bonding , 1992 .

[18]  H. Riedel,et al.  Capacitive silicon accelerometer with highly symmetrical design , 1990 .

[19]  A. Manz,et al.  Miniaturized total chemical analysis systems: A novel concept for chemical sensing , 1990 .