Design and fabrication of piezoelectric micro power generators for autonomous microsystems

This paper presents a design and fabrication of piezoelectric micro power generators intended to be a power source for autonomous microsystems. Modelling and simulation of such structures are presented. A power output of 60nW for AIN and 600nW for PZT, resulting from Finite Element Method simulations is reported. Fabrication process involving deposition of AIN layers is presented and detailed.