6D-2 MEMS-Enabled Miniaturized Particulate Matter Monitor Employing 1.6 GHz Aluminum Nitride Thin-Film Bulk Acoustic Wave Resonator (FBAR) and Thermophoretic Precipitator
暂无分享,去创建一个
R.M. White | M. Apte | R.M. White | J. Black | A. Elium | L. Gundel | R. Cambie | J.P. Black | A. Elium | M.G. Apte | L.A. Gundel | R. Cambie | R. White
[1] Mark E. Thompson,et al. A film bulk acoustic resonator in liquid environments , 2005 .
[2] W. Shih,et al. A unipolar corona discharge microfabricated ionizer structure for gases at atmospheric pressure and composition , 2004, 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest.
[3] J. Gerberding,et al. Actual causes of death in the United States, 2000. , 2004, JAMA.
[4] D. Faulkner,et al. Environmental Tobacco Smoke Leakage from Smoking Rooms , 2004, Journal of occupational and environmental hygiene.
[5] Wolfram Wersing,et al. Novel integrated FBAR sensors: a universal technology platform for bio- and gas-detection , 2003, Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498).
[6] J. Rabaey,et al. A 300-μW 1.9-GHz CMOS oscillator utilizing micromachined resonators , 2003, IEEE J. Solid State Circuits.
[7] F. Zheng. Thermophoresis of spherical and non-spherical particles: a review of theories and experiments. , 2002, Advances in colloid and interface science.
[8] P. Blackman. Actual causes of death in the United States. , 1994, JAMA.
[9] McGinnis Jm,et al. Actual causes of death in the United States. , 1993 .
[10] R. Weber,et al. Applications of AlN thin-film resonator topologies as antennas and sensors , 1992, 1992 IEEE Microwave Symposium Digest MTT-S.
[11] Stephen J. Martin,et al. Characterization of a quartz crystal microbalance with simultaneous mass and liquid loading , 1991 .
[12] Joel F. Rosenbaum,et al. Bulk Acoustic Wave Theory and Devices , 1988 .
[13] S. G. Burns,et al. Fundamental-Mode Pierce Oscillators Utilizing Bulk-Acoustic-Wave Resonators in the 250 - 300 MHz Range , 1984 .
[14] J. Olin,et al. Piezoelectric-electrostatic aerosol mass concentration monitor. , 1971, American Industrial Hygiene Association journal.
[15] G. Sauerbrey. Verwendung von Schwingquarzen zur Wägung dünner Schichten und zur Mikrowägung , 1959 .
[16] Brian Otis,et al. A 300µmW 1.9GHz CMOS oscillator utilizing micromachined resonators , 2002, Proceedings of the 28th European Solid-State Circuits Conference.
[17] R. Chuan. An instrument for the direct measurement of particulate mass , 1970 .
[18] G. Sauerbrey,et al. Use of quartz vibration for weighing thin films on a microbalance , 1959 .