Design, Simulation and Experimental Study of the Linear Magnetic Microactuator

This paper reports the design, simulation and experimental study of a linear magnetic microactuator for portable electronic equipment and microsatellite high resolution remote sensing technology. The linear magnetic microactuator consists of a planar microcoil, a supporter and a microspring. Its bistable mechanism can be kept without current by external permanent magnetic force, and can be switched by the bidirectional electromagnetic force. The linearization and threshold of the bistable mechanism was optimized by topology structure design of the microspring. The linear microactuator was then fabricated based on non-silicon technology and the prototype was tested. The testing results indicated that the bistable mechanism was realized with a fast response of 0.96 ms, which verified the simulation and analysis.

[1]  B. Ponick,et al.  Magnetic Levitation Assisted Guide for a Linear Micro-Actuator , 2006, IEEE Transactions on Magnetics.

[2]  Chien-Sheng Liu,et al.  Experimental Characterization of High-Performance Miniature Auto-Focusing VCM Actuator , 2011, IEEE Transactions on Magnetics.

[3]  Guifu Ding,et al.  Segmented magnetic circuit simulation of the large displacement planar micro-coil actuator with enclosed magnetic yokes , 2014 .

[4]  S. Fang,et al.  Static Characteristics of Novel Air-Cored Linear and Rotary Halbach Permanent Magnet Actuator , 2014, IEEE Transactions on Magnetics.

[5]  Masako Tanaka,et al.  An industrial and applied review of new MEMS devices features , 2007 .

[6]  Joongho Choi,et al.  A piezoelectric actuator driver circuit for automatic focusing of mobile phone cameras , 2008, 2008 IEEE International Symposium on Circuits and Systems.

[8]  Haoyong Yu,et al.  A linear actuator for precision positioning of dual objects , 2015 .

[9]  J. Bryzek,et al.  Control issues for MEMS , 2003, 42nd IEEE International Conference on Decision and Control (IEEE Cat. No.03CH37475).

[10]  Shi Sun,et al.  Nonlinear Electromagnetic Vibration Energy Harvester With Closed Magnetic Circuit , 2018, IEEE Magnetics Letters.

[11]  Shi Sun,et al.  MEMS-based wide-bandwidth electromagnetic energy harvester with electroplated nickel structure , 2017 .

[12]  J. Miao,et al.  Investigation of Multimodal Electret-Based MEMS Energy Harvester With Impact-Induced Nonlinearity , 2018, Journal of Microelectromechanical Systems.

[13]  F.L. Lewis,et al.  Open vs. Closed-Loop Control of the MEMS Electrostatic Comb Drive , 2005, Proceedings of the 2005 IEEE International Symposium on, Mediterrean Conference on Control and Automation Intelligent Control, 2005..

[14]  S. Braune,et al.  A novel linear actuator for variable valve actuation , 2005, 2005 IEEE International Conference on Industrial Technology.

[15]  Guifu Ding,et al.  Tuning of nonlinear vibration via topology variation and its application in energy harvesting , 2012 .

[16]  Jack W. Judy,et al.  Microelectromechanical systems (MEMS): fabrication, design and applications , 2001 .

[17]  Masahiro Sato,et al.  Motion Monitoring of MEMS Actuator with Electromagnetic Induction , 2014 .

[18]  Kai Dong,et al.  Complementary Electromagnetic‐Triboelectric Active Sensor for Detecting Multiple Mechanical Triggering , 2018 .

[19]  John T.W. Yeow,et al.  Nonlinear control of an electromagnetic polymer MEMS hard-magnetic micromirror and its imaging application , 2014 .

[20]  F. Piriou,et al.  Modeling of A Linear and Rotary Permanent Magnet Actuator , 2008, IEEE Transactions on Magnetics.

[21]  Yves H. Berthelot,et al.  Simulated and experimental dynamic response characterization of an electromagnetic microvalve , 2008 .

[22]  W. Benecke,et al.  Microfabricated actuator with moving permanent magnet , 1991, [1991] Proceedings. IEEE Micro Electro Mechanical Systems.

[23]  Myung-Jin Chung,et al.  Development of compact camera module having auto focus actuator and mechanical shutter system for mobile phone , 2007, 2007 International Conference on Control, Automation and Systems.

[24]  Ming C. Wu,et al.  Monolithic Bi-directional Linear Microactuator for Light Beam Manipulation , 2006, IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006..

[25]  Chanwoo Park,et al.  A highly accurate piezoelectric actuator driver IC for auto-focus in camera module of mobile phone , 2010, Proceedings of 2010 IEEE International Symposium on Circuits and Systems.