论文信息 - Characterization and simulation of optimized micro paddle bridge resonator for magnetic field measurements

Characterization and simulation of optimized micro paddle bridge resonator for magnetic field measurements

A novel design of micro paddle bridge resonant magnetic field sensor based on electrostatic actuation and capacitive detection technique is characterized and simulated using CoventorWare. The sensor consists of Aluminum plus shape paddle bridge resonator with two proof mass arms, driving electrodes, sensing electrode and silicon substrate. Working in a resonant condition, the sensor's vibration amplitude is converted into the sensing capacitance change, which reflects the outside magnetic flux-density. Based on the simulation, the key structure parameters are optimized and the resonant frequency is estimated. The results of the device are in accordance with the theoretical values of the designed model. The results indicate its sensitivity 0.252 pA/uT, when operating at 10% of critical damping. The sensitivity and resolution can be enhanced through vacuum packaging.

[1] Stephen P. Timoshenko,et al. Vibration problems in engineering , 1928 .

[2] W. Thomson. Theory of vibration with applications , 1965 .

[3] S. Kordić,et al. Integrated silicon magnetic-field sensors , 1986 .

[4] S. V. Gumenjuk,et al. Integrated magnetic field sensor with frequency output , 1991 .

[5] Radivoje Popovic,et al. The future of magnetic sensors , 1996 .

[6] Henry Guckel,et al. Amplitude detecting micromechanical resonating beam magnetometer , 1998, Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176.

[7] H. Emmerich,et al. Magnetic field measurements with a novel surface micromachined magnetic-field sensor , 2000 .

[8] Arantxa Uranga,et al. Electrical detection of multiple resonant modes in a CMOS-MEMS cantilever , 2007 .

[9] Jaume Verd Martorell. Monolithic CMOS-MEMS resonant beams for ultrasensitive mass detection , 2008 .

[10] Nor Hisham Hamid,et al. Design and modeling of MEMS resonator for magnetic field sensing using hybrid actuation technique , 2010, 2010 IEEE Asia Pacific Conference on Circuits and Systems.

[11] Nor Hisham Hamid,et al. Design and simulation of mechanical behavior of MEMS-based resonant magnetic field sensor with piezoresistive output , 2010, 2010 International Conference on Mechanical and Electrical Technology.