Exploitation of atomic layer deposition for nanostructured materials
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Marianna Kemell | Mikko Ritala | Jun Lu | Kaupo Kukli | Viljami Pore | K. Kukli | M. Ritala | M. Leskelä | E. Santala | M. Kemell | Jun Lu | Markku Leskelä | Eero Santala | V. Pore
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