Micro Electro Thermo Fluidic (METF) liquid microprocessor

A liquid microprocessor concept based on a new actuator principle is introduced for a true automation of liquid handling in chemical analysis. Silicon microvalves do not satisfy the requirements of an absolute leaktightness, a zero functional dead volume, particle tolerance and reliability providing unlimited working life which requirements are met with Micro Electro Thermo Fluidic (METF) valves. Other beneficial features are no moving part reliability, very small size in comparison to flow resistance, noncontact sensing of valve position. METF actuator principle is a phase change between liquid and solid within the controlled liquid itself, thus requiring extra costs, a special heat sink. Liquid microprocessor architecture utilizes partition of functions for reliable integration. The five logic positions of METE valves form a "microcode" for simple programming of liquid processing steps. Hydraulic liquid dispensing in METF liquid processor eliminates surface tension errors and makes possible nanoliter liquid processing. The high reliability of hermetic liquid processing functions and inherent sensing and control of each METE step opens a true miniaturization and automation potential for chemical and biochemical analysis.