Extraction Method for the Impact-Ionization Multiplication Factor in Silicon at Large Operating Temperatures

Aim of this work is to illustrate a setup for the extraction of the impact-ionization multiplication factor in silicon as a function of the electric field on an extended range of temperatures, up to 800 K. First, the design of the optimal test structures for the measurements has been tackled, using Infineon’s SPT5 TM technology. Validating by numerical simulation the local relation between impact ionization and electric field, two different devices have been analysed and tested.