论文信息 - Thermal stability of ultra thin Zr-B-N films as diffusion barrier between Cu and Si - 字舞流文

Thermal stability of ultra thin Zr-B-N films as diffusion barrier between Cu and Si

Yao Li | D. Qian | Z.X. Song | W. Hu | M. Yu | Y. Li | K. Xu | W. Hu | Z. Song | Wen-hao Hu | K. Xu | Y. Meng