Terahertz detector for imaging in 180-nm standard CMOS process

A CMOS terahertz (THz) detector implemented in a 180-nm standard CMOS process is proposed, and room-temperature detection of 0.94-THz radiation is demonstrated. The detector consists of an integrated on-chip patch antenna and a source-feeding NMOS transistor as the rectifying element. To improve the power transfer efficiency between the patch antenna and NMOS transistor, a novel short-stub matching network is proposed. An open quarter-wavelength microstrip transmission line connecting gate is proposed to eliminate the influence of the bonding wire and pad on the antenna-transistor impedance matching. Illuminated by a 0.94-THz BWO source, the measured voltage responsivity (Rv) and noise equivalent power (NEP) of the detector are 31 V/W and 1.1 nW/Hz1/2, respectively.

[1]  S. M. Sze,et al.  Physics of semiconductor devices , 1969 .

[2]  P. Richards,et al.  Stressed photoconductive detector for far-infrared space applications. , 1987, Applied optics.

[3]  D. Pozar.  Microwave Engineering , 1990 .

[4]  Shur,et al.  Shallow water analogy for a ballistic field effect transistor: New mechanism of plasma wave generation by dc current. , 1993, Physical review letters.

[5]  M. Shur,et al.  Detection, mixing, and frequency multiplication of terahertz radiation by two-dimensional electronic fluid , 1996 .

[6]  Michael S. Shur,et al.  Terahertz detection by high-electron-mobility transistor: Enhancement by drain bias , 2001 .

[7]  H. Richter,et al.  NbN hot electron bolometric mixers for terahertz receivers , 2001 .

[8]  Michael S. Shur,et al.  Plasma wave detection of sub-terahertz and terahertz radiation by silicon field-effect transistors , 2004 .

[9]  J. Federici,et al.  THz imaging and sensing for security applications—explosives, weapons and drugs , 2005 .

[10]  Peter de Maagt,et al.  Terahertz Science, Engineering and Systems—from Space to Earth Applications , 2005 .

[11]  S. Sze,et al.  Physics of Semiconductor Devices: Sze/Physics , 2006 .

[12]  Hua Zhong,et al.  Terahertz Spectroscopy and Imaging for Defense and Security Applications , 2007, Proceedings of the IEEE.

[13]  Ullrich R. Pfeiffer,et al.  A 600-GHz CMOS focal-plane array for terahertz imaging applications , 2008, ESSCIRC 2008 - 34th European Solid-State Circuits Conference.

[14]  Alvydas Lisauskas,et al.  A 0.65 THz Focal-Plane Array in a Quarter-Micron CMOS Process Technology , 2009, IEEE Journal of Solid-State Circuits.

[15]  Ullrich R. Pfeiffer,et al.  Terahertz imaging detectors in a 65-nm CMOS SOI technology , 2010, 2010 Proceedings of ESSCIRC.

[16]  K. Kawase,et al.  THz imaging techniques for nondestructive inspections , 2010 .

[17]  D. Grischkowsky,et al.  Broadband THz Pulse Transmission Through the Atmosphere , 2011, IEEE Transactions on Terahertz Science and Technology.

[18]  K. Ajito,et al.  THz Chemical Imaging for Biological Applications , 2011, IEEE Transactions on Terahertz Science and Technology.

[19]  Janusz Grzyb,et al.  A broadband 0.6 to 1 THz CMOS imaging detector with an integrated lens , 2011, 2011 IEEE MTT-S International Microwave Symposium.

[20]  Ruonan Han,et al.  A 280-GHz Schottky Diode Detector in 130-nm Digital CMOS , 2010, IEEE Journal of Solid-State Circuits.

[21]  Nuria Llombart,et al.  THz Imaging Radar for Standoff Personnel Screening , 2011, IEEE Transactions on Terahertz Science and Technology.

[22]  Yan Zhao,et al.  A 1 k-Pixel Video Camera for 0.7–1.1 Terahertz Imaging Applications in 65-nm CMOS , 2012, IEEE Journal of Solid-State Circuits.

[23]  Ehsan Afshari,et al.  280GHz and 860GHz image sensors using Schottky-barrier diodes in 0.13μm digital CMOS , 2012, 2012 IEEE International Solid-State Circuits Conference.

[24]  Dongmin Wu,et al.  High-responsivity, low-noise, room-temperature, self-mixing terahertz detector realized using floating antennas on a GaN-based field-effect transistor , 2012 .

[25]  Yang Yu-Ping,et al.  Broadband long-path THz pulse transmission through the atmosphere , 2013 .

[26]  Li-yuan Liu,et al.  Design of 1-THz field effect transistor detectors in 180-nm standard CMOS process , 2013, Other Conferences.