Suppression of Subcutaneous Oxidation during the Deposition of Amorphous Lanthanum Aluminate on Silicon
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B. Holländer | Y. Chabal | G. Lucovsky | S. Stemmer | M. Copel | J. Schubert | L. Edge | C. Hinkle | D. Schlom | S. Chambers | Yan Yang | R. Brewer | Joshua R. Williams | Joshua Williams