The effect of electron cyclotron resonance plasma parameters on the aspect ratio of trenches in HgCdTe
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William A. Radford | J. D. Benson | John H. Dinan | P. R. Boyd | Edward P. Smith | J. B. Varesi | A. W. Kaleczyc | J. Varesi | J. Benson | Scott M. Johnson | A. J. Stoltz | M. Martinka | A. Stoltz | M. Martinka | A. Kaleczyc | P. Boyd | J. Dinan | W. Radford | E. Smith | S. Johnson | W. A. Radford | J. H. Dinan
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