Highly sensitive gas leak detector based on a quartz-enhanced photoacoustic SF6 sensor.

The implementation, performance validation, and testing of a gas-leak optical sensor based on mid-IR quartz-enhanced photoacoustic (QEPAS) spectroscopic technique is reported. A QEPAS sensor was integrated in a vacuum-sealed test station for mechatronic components. The laser source for the sensor is a quantum cascade laser emitting at 10.56 µm, resonant with a strong absorption band of sulfur hexafluoride (SF6), which was selected as a leak tracer. The minimum detectable concentration of the QEPAS sensor is 2.7 parts per billion with an integration time of 1 s, corresponding to a sensitivity of leak flows in the 10-9 mbar∙l/s range, comparable with state-of-the-art leak detection techniques.

[1]  Kenji Kawashima,et al.  Determination of temperature recovery time in differential-pressure-based air leak detector , 2006 .

[2]  Vincenzo Spagnolo,et al.  Photoacoustic Techniques for Trace Gas Sensing Based on Semiconductor Laser Sources , 2009, Sensors.

[3]  Vincenzo Spagnolo,et al.  Single mode operation with mid-IR hollow fibers in the range 5.1-10.5 µm. , 2015, Optics express.

[4]  M. Bergoglio,et al.  Leak detection, calibrations and reference flows: Practical example , 2007 .

[5]  Nicolas Javahiraly,et al.  Review on hydrogen leak detection: comparison between fiber optic sensors based on different designs with palladium , 2015 .

[6]  Frank K. Tittel,et al.  Allan Deviation Plot as a Tool for Quartz-Enhanced Photoacoustic Sensors Noise Analysis , 2016, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control.

[7]  D. Cox,et al.  Continuous-wave CO2 laser spectroscopy of SF6, WF6, and UF6 , 1980 .

[8]  Frank K. Tittel,et al.  Quartz-Enhanced Photoacoustic Spectroscopy: A Review , 2014, Sensors.

[9]  Carl A. M. Brenninkmeijer,et al.  Atmospheric SF6: Trends, sources and prospects , 1998 .

[10]  S. Borri,et al.  Molecular gas sensing below parts per trillion: radiocarbon-dioxide optical detection. , 2011, Physical review letters.

[11]  Frank K. Tittel,et al.  Improved Tuning Fork for Terahertz Quartz-Enhanced Photoacoustic Spectroscopy , 2016, Sensors.

[12]  Marc P.Y. Desmulliez,et al.  MEMS ultra low leak detection methods: a review , 2009 .

[13]  G. Scamarcio,et al.  Mid-infrared fiber-coupled QCL-QEPAS sensor , 2013 .

[14]  Chenyang Xue,et al.  Development of an Optical Gas Leak Sensor for Detecting Ethylene, Dimethyl Ether and Methane , 2013, Sensors.

[15]  G. Scamarcio,et al.  Part-per-trillion level SF6 detection using a quartz enhanced photoacoustic spectroscopy-based sensor with single-mode fiber-coupled quantum cascade laser excitation. , 2012, Optics letters.

[16]  V. A. Kapitanov,et al.  High-sensitivity laser photoacoustic leak detector , 2007 .

[17]  R. W. Bernstein,et al.  Capacitive differential pressure sensor for harsh environments , 2000 .

[18]  Frank K. Tittel,et al.  Hollow core waveguide as mid-infrared laser modal beam filter , 2015 .

[19]  A. Kosterev,et al.  Applications of quartz tuning forks in spectroscopic gas sensing , 2005 .

[20]  Infrared absorption coefficients (3-15 microm) for sulfur hexafluoride (SF(6)) and Freon (CCI(2)F(2)). , 1979, Applied optics.