We have developed ozone (O3) generation system suitable to soil sterilization. Wide range concentration control of O3 is required for the sterilization treatment depending on the soil property and plant growth. The dielectric barrier discharges using electrode such as Pyramid type is studied. Surface discharges are also applied to generate high concentration for quick sterilization of the agricultural soil. The treated soil properties under ozone sterilization were evaluated using pH and electrical conductivity. It is shown that ozone distribution in the soil is controlled mostly by the conditions such as concentration and flow rate as well as soil conditions of moisture and compositions.