Improved Fabrication Method for Nb/Al/AlOx/Al/Nb Superconducting Tunnel Junctions as X-Ray Detectors

Niobium-based superconducting tunnel junctions (STJs) with aluminum trapping layers as X-ray detectors were fabricated. We applied a fabrication technique for reducing the leakage current and improving the energy resolution for X-rays at around 6 keV. The edges of two Al layers sandwiching a tunneling barrier were oxidized by plasma discharge. The performance of these new STJs was compared with other types of STJs to which thermal oxidization in an O2 atmosphere had been applied. The oxidization process in O2 plasma significantly improved the energy resolution for X-rays, which reached values (FWHM) of 41 eV, 58 eV, 65 eV, and 129 eV for STJs with the size of 20×20 µm2, 100×100 µm2, 200×200 µm2, and 500×500 µm2, respectively.