论文信息 - Study of growth kinetics and depth resolved composition of a-SiNx:H thin films by resonant soft X-ray reflectivity at the Si L2,3-edge - 字舞流文

Study of growth kinetics and depth resolved composition of a-SiNx:H thin films by resonant soft X-ray reflectivity at the Si L2,3-edge

Santanu Ghosh | P. Srivastava | M. H. Modi | Shengqiang Zhou | R. K. Bommali | P. Srivastava | M. Modi