Micro tensile-test of silicon film having different crystallographic orientations

Uniaxial tensile testing of a single-crystal silicon film was carried out on a silicon chip. A tensile testing system was integrated on a silicon chip. A process for fabricating a test chip containing a specimen whose tensile axis has an arbitrary orientation was developed. The mechanical properties, such as elastic modulus and fracture strain, of silicon films having different orientations of <100>, <110>, and <111>, are tested and compared.