Composition and orientation dependence of electrical properties of epitaxial Pb(ZrxTi1−x)O3 thin films grown using metalorganic chemical vapor deposition

The composition dependence and orientation anisotropy of the dielectric and ferroelectric properties of epitaxial Pb(ZrxTi1−x)O3 (PZT) thin films grown using metalorganic chemical vapor deposition were investigated. {100}-, {110}-, and {111}-oriented PZT films were ascertained to have been grown on (100)c, (110)c, and (111)cSrRuO3//SrTiO3 substrates, respectively. The relative dielectric constant reached a maximum near x=0.5, around the morphotropic phase boundary (MPB) composition, irrespective of film orientation, with the {111}-oriented film showing the largest value. Well-saturated hysteresis loops were observed for all films, and abrupt saturation of the remanent polarization (Pr) and coercive field (Ec) values were observed when the value of x was small, irrespective of film orientation. The Ec value reached a minimum around the composition for {110}- and {111}-oriented films but not for {100}-oriented ones. The saturated polarization (Psat) and Pr values for the {111}-oriented film reached a maximu...

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