Nonlinear Mechanics of Suspension Beams for a Micromachined Gyroscope

We present a method for the calculation of the coefficients of cubic stiffening for tether-suspended micromachined systems. The analysis is based on a nonlinear rod theory, and enables the prediction of the maximum achievable motion amplitude prior to the onset of nonlinear behavior. The analysis is applied in detail to a microgyroscope. Comparisons with a finite element model and experimental data are used to validate the analysis, and issues pertaining to the optimal design of the gyroscope’s suspension are investigated.

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