论文信息 - Spring Constant Models for Analysis and Design of MEMS Plates on Straight or Meander Tethers - 字舞流文

Spring Constant Models for Analysis and Design of MEMS Plates on Straight or Meander Tethers

Conor O'Mahony | Maryna Lishchynska | Nicolas Cordero | Orla Slattery | Conor O'Mahony | C. O’Mahony | N. Cordero | Maryna Lishchynska | O. Slattery