Low-temperature plasma-enhanced atomic layer deposition of HfO2/Al2O3 nanolaminate structure on Si
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Xinhong Cheng | Li Zheng | Yuehui Yu | C. Xia | Zhongjian Wang | D. Cao | D. Shen | Dawei Xu | Lingyan Shen
暂无分享,去创建一个
Xinhong Cheng | Li Zheng | Yuehui Yu | C. Xia | Zhongjian Wang | D. Cao | D. Shen | Dawei Xu | Lingyan Shen