Neutron soft error rate measurements in a 90-nm CMOS process and scaling trends in SRAM from 0.25-/spl mu/m to 90-nm generation

The neutron soft error rate (SER) dependency on voltage and area was measured for a state-of-the-art 90-nm CMOS technology. The SER increased by 18% for a 10% reduction in voltage, and scaled linearly with diode area. The measured SER per bit of SRAMs in 0.25 /spl mu/m, 0.18 /spl mu/m, 0.13 /spl mu/m, and 90 nm showed an increase of 8% per generation.