论文信息 - Selective ablation of AlN ceramic using femtosecond, nanosecond, and microsecond pulsed laser

Selective ablation of AlN ceramic using femtosecond, nanosecond, and microsecond pulsed laser

The microsecond, nanosecond, and femtosecond laser ablation of AlN ceramic with a transversely excited atmospheric (TEA) CO2 laser, KrF excimer laser, and Ti:sapphire laser is demonstrated. It is shown that the laser-induced thermal decomposition process occurs with a microsecond TEA CO2 laser and a nanosecond KrF excimer laser. With the microsecond and nanosecond laser-induced thermal decomposition process, the conductive aluminum line can be directly fabricated and very low resistance can be obtained with a TEA CO2 laser. In the case of femtosecond Ti:sapphire laser ablation, there are two different regimes of ablation rate-like metals. In addition, a nonthermal process without a chemical composition change of the ablated surface can be achieved successfully, which is evident from scanning electron microscopy observation and x-ray photoelectron spectroscopy analysis of the ablated surface.

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