Demonstration of PECVD SiC–SiO $_{2}$–SiC Horizontal Slot Waveguides

We report on the first demonstration of guiding light in horizontal slot-waveguides using a plasma-enhanced chemical vapor deposition silicon carbide (SiC)-silicon oxide (SiO2)-SiC structure. Propagation losses of 23.9 ±1.2 dB/cm have been measured for the quasi-transverse-magnetic mode of the fabricated slot waveguides at 1.3 ¿m .

[1]  M. Lipson,et al.  Electrically driven silicon resonant light emitting device based on slot-waveguide. , 2005, Optics express.

[2]  Michael Hochberg,et al.  High-Q Optical Resonators in Silicon-on-Insulator-Based Slot Waveguides , 2005 .

[3]  Pasqualina M. Sarro,et al.  Fabrication and characteristics of a PECVD SiC evanescent wave optical sensor , 2008 .

[4]  Steven G. Johnson,et al.  Block-iterative frequency-domain methods for Maxwell's equations in a planewave basis. , 2001, Optics express.

[5]  R. Hainberger,et al.  Lateral leakage in symmetric SOI rib-type slot waveguides , 2007 .

[6]  Qianfan Xu,et al.  Experimental demonstration of guiding and confining light in nanometer-size low-refractive-index material. , 2004, Optics letters.

[7]  A. Griol,et al.  Demonstration of slot-waveguide structures on silicon nitride / silicon oxide platform. , 2007, Optics express.

[8]  R Lawson,et al.  Optical modulation and detection in slotted Silicon waveguides. , 2005, Optics express.

[9]  T.L. Koch,et al.  Low Loss Si–SiO $_{2}$–Si 8-nm Slot Waveguides , 2009, IEEE Photonics Technology Letters.

[10]  J. Li,et al.  Low loss Si-SiO2-Si 8nm slot waveguides , 2008, 2008 Conference on Lasers and Electro-Optics and 2008 Conference on Quantum Electronics and Laser Science.

[11]  P. Sarro,et al.  Polarization-insensitive PECVD SiC waveguides for sensor platform , 2006 .

[12]  M. Koshiba,et al.  Guided modes of nonlinear slot waveguides , 2006, IEEE Photonics Technology Letters.

[13]  M. Lipson,et al.  High confinement in silicon slot waveguides with sharp bends. , 2006, Optics express.

[14]  Changbao Ma,et al.  Analysis of symmetric and asymmetric nanoscale slab slot waveguides , 2009 .

[15]  N. Feng,et al.  Horizontal single and multiple slot waveguides: optical transmission at λ=1550 nm , 2007 .

[16]  F. Payne,et al.  A theoretical analysis of scattering loss from planar optical waveguides , 1994 .

[17]  Li Chen,et al.  A SiC MEMS Resonant Strain Sensor for Harsh Environment Applications , 2007, IEEE Sensors Journal.

[18]  J. Michel,et al.  Optical field concentration in low-index waveguides , 2006, IEEE Journal of Quantum Electronics.