Through-focus scanning optical microscopy applications
暂无分享,去创建一个
[1] Benjamin Bunday,et al. Use of TSOM for sub-11nm node pattern defect detection and HAR features , 2013, Advanced Lithography.
[2] Ndubuisi G. Orji,et al. Virtual Metrology White Paper - INTERNATIONAL ROADMAP FOR DEVICES AND SYSTEMS(IRDS) , 2018 .
[3] Erik Novak,et al. TSOM method for semiconductor metrology , 2011, Advanced Lithography.
[4] Richard M. Silver,et al. Optical illumination and critical dimension analysis using the through-focus focus metric method , 2006, SPIE Optics + Photonics.
[5] András E. Vladár,et al. A method to determine the number of nanoparticles in a cluster using conventional optical microscopes , 2015 .
[6] Hyeonggon Kang,et al. Parameter optimization for through-focus scanning optical microscopy. , 2016, Optics express.
[7] S Y Oh,et al. Method for optical inspection of nanoscale objects based upon analysis of their defocused images and features of its practical implementation. , 2013, Optics express.
[8] Aaron Cordes,et al. Gaps analysis for CD metrology beyond the 22nm node , 2013, Advanced Lithography.
[9] E A Patterson,et al. Three‐dimensional automated nanoparticle tracking using Mie scattering in an optical microscope , 2011, Journal of microscopy.
[10] Benjamin Bunday,et al. Critical dimension metrology by through-focus scanning optical microscopy beyond the 22 nm node , 2013 .
[11] Ravi Kiran Attota,et al. Feasibility study on 3-D shape analysis of high-aspect-ratio features using through-focus scanning optical microscopy. , 2016, Optics express.
[12] Ravikiran Attota. Noise analysis for through-focus scanning optical microscopy. , 2016, Optics letters.
[13] Ravikiran Attota,et al. Through-focus scanning-optical-microscope imaging method for nanoscale dimensional analysis. , 2008, Optics letters.
[14] Benjamin Bunday,et al. Patterned Defect & CD Metrology by TSOM Beyond the 22 nm Node | NIST , 2012 .
[15] E. Fort,et al. Three-dimensional nanometre localization of nanoparticles to enhance super-resolution microscopy , 2015, Nature Communications.
[16] Haesung Park,et al. Optical microscope illumination analysis using through-focus scanning optical microscopy. , 2017, Optics letters.
[17] Maxim Ryabko,et al. Improved critical dimension inspection for the semiconductor industry , 2014 .
[18] Marina A. Dobrovolskaia,et al. Common pitfalls in nanotechnology: lessons learned from NCI's Nanotechnology Characterization Laboratory. , 2013, Integrative biology : quantitative biosciences from nano to macro.
[19] Ravikiran Attota,et al. Optical microscope angular illumination analysis. , 2012, Optics express.
[20] Vibhu Jindal,et al. Inspecting mask defects with through-focus scanning optical microscopy , 2013 .
[21] A. Karim,et al. Multimodal optical studies of single and clustered colloidal quantum dots for the long-term optical property evaluation of quantum dot-based molecular imaging phantoms , 2012, Biomedical optics express.
[22] Sergey Koptyaev,et al. Motion-free all optical inspection system for nanoscale topology control. , 2014, Optics express.
[23] Francesco S. Pavone,et al. 3D tracking of single nanoparticles and quantum dots in living cells by out-of-focus imaging with diffraction pattern recognition , 2015, Scientific Reports.
[24] Jayanth Panyam,et al. Biodegradable nanoparticles for drug and gene delivery to cells and tissue. , 2003, Advanced drug delivery reviews.
[25] Ronald G. Dixson,et al. Resolving three-dimensional shape of sub-50 nm wide lines with nanometer-scale sensitivity using conventional optical microscopes , 2014 .
[26] András E. Vladár,et al. Nanoparticle size and shape evaluation using the TSOM method , 2012, Advanced Lithography.
[27] S. Usha,et al. Through Focus Optical Imaging Technique To Analyze Variations In Nano-Scale Indents , 2013 .
[28] Ravikiran Attota,et al. Optimizing noise for defect analysis with through-focus scanning optical microscopy , 2016, SPIE Advanced Lithography.
[29] Richard A. Allen,et al. TSV reveal height and dimension metrology by the TSOM method , 2013, Advanced Lithography.
[30] Sergey Koptyaev,et al. Through-focus scanning optical microscopy (TSOM) considering optical aberrations: practical implementation. , 2015, Optics express.
[31] Jun Ho Lee,et al. Tip/tilt-compensated through-focus scanning optical microscopy , 2016, SPIE/COS Photonics Asia.
[32] Lei Chen,et al. Through-focus scanning and scatterfield optical methods for advanced overlay target analysis , 2009, Advanced Lithography.
[33] S. Tans,et al. High-throughput 3D tracking of bacteria on a standard phase contrast microscope , 2015, Nature Communications.
[34] Richard M. Silver,et al. Nanometrology using a through-focus scanning optical microscopy method , 2011 .
[35] Alexander Y Katsov,et al. fast multicolor 3 d imaging using aberration-corrected multifocus microscopy , 2012 .
[36] Ronald G. Dixson,et al. Through-focus scanning optical microscopy , 2011, Defense + Commercial Sensing.
[37] Ravi Kiran Attota. Step beyond Kohler illumination analysis for far-field quantitative imaging: angular illumination asymmetry (ANILAS) maps. , 2016, Optics express.
[38] Benjamin Bunday,et al. Patterned defect and CD metrology by TSOM beyond the 22-nm node , 2012, Advanced Lithography.
[39] C. H. Crouch,et al. Collective fluorescence enhancement in nanoparticle clusters. , 2011, Nature communications.
[40] William J. Godinez,et al. Objective comparison of particle tracking methods , 2014, Nature Methods.
[41] M. Minsky. Memoir on inventing the confocal scanning microscope , 1988 .
[42] Richard Kasica,et al. Nanoparticle size determination using optical microscopes , 2014 .