Superconducting properties, electrical resistivities, and structure of NbN thin films

Superconducting properties and electrical resistivities of NbN thin films have been studied as a function of sputtering parameters, film structure, and composition. A good correlation exists between superconducting Tc's and film structure and composition regardless of the sputtering conditions used to achieve this structure. The most important parameters affecting Tc are lattice parameter, crystal structure, island structure, and impurity content. Substrate temperature, Ar/N2 ratio, and impurity content are the principal sputtering parameters affecting film structure, and thus Tc.

[1]  C. K. Jones,et al.  Superconducting Properties of Niobium Carbonitride Thin Films , 1971 .

[2]  C. A. Neugebauer,et al.  Electrical Conduction Mechanism in Ultrathin, Evaporated Metal Films , 1962 .

[3]  P. Hall,et al.  Superconducting Thin Films of Niobium, Tantalum, Tantalum Nitride, Tantalum Carbide, and Niobium Nitride , 1964 .

[4]  R. Marcus.  Electrical and Structural Properties of Epitaxial bcc Tantalum Films , 1966 .

[5]  T. Yamashita,et al.  Superconducting Transition Temperatures of R. F. Sputtered NbN Films , 1971 .

[6]  L. Maissel,et al.  Thin Films Deposited by Bias Sputtering , 1965 .

[7]  J. J. Hauser,et al.  Getter Sputtering for the Preparation of Thin Films of Superconducting Elements and Compounds , 1964 .

[8]  The Preparation of Thin Films of B-1 Structure Superconducting Ternary Compounds , 1973 .

[9]  R. Tauber,et al.  Preparation, Structure, and Properties of Sputtered, Highly Nitrided Tantalum Films , 1968 .

[10]  L. Toth,et al.  Superconducting properties of reactively sputtered thin-film ternary nitrides, Nb--Ti--N and Nb--Zr--N , 1968 .

[11]  C. K. Jones,et al.  Superconducting properties as a function of thickness in NbN films , 1971 .

[12]  L. Toth.  Transition Metal Carbides and Nitrides , 1971 .

[13]  F. Vrátný,et al.  Tantalum Films Deposited by Asymmetric A‐C Sputtering , 1965 .

[14]  G. W. Hull,et al.  Superconductivity of niobium thin films deposited by dc-diode sputtering , 1967 .

[15]  C. K. Jones,et al.  High Field Properties of Pure Niobium Nitride Thin Films , 1969 .

[16]  T. Yamashita,et al.  Superconductive Transition Temperatures of Reactively Sputtered Niobium Films , 1968 .

[17]  J. K. Hulm,et al.  Preparation and Superconducting Properties of Thin Films of Transition Metal Interstitial Compounds , 1969 .

[18]  L. Toth,et al.  Superconducting Critical Fields and Currents of Nb–Ti–N Thin Films in Continuous Magnetic Fields to 175 kG , 1969 .

[19]  J. J. Hauser,et al.  SUPERCONDUCTING TANTALUM FILMS , 1964 .