Optical tomography for dielectric profiling in processing electronic materials
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[1] Anthony J. Devaney,et al. Phase-retrieval and intensity-only reconstruction algorithms for optical diffraction tomography , 1993 .
[2] Tomasz Dyakowski,et al. Process tomography - the state of the art , 1998 .
[3] Jakob J. Stamnes,et al. Experimental examination of the quantitative imaging properties of optical diffraction tomography , 1995 .
[4] David G. Seiler,et al. Characterization of two‐dimensional dopant profiles: Status and review , 1995 .
[5] M. Henini. Optical characterization of epitaxial semiconductor layers: G. Bauer and W. Richter (eds), Springer, Berlin, Heidelberg, New York, ISBN: 3-540-59129-X , 1996 .
[6] L. E. Larsen,et al. Limitations of Imaging with First-Order Diffraction Tomography , 1984 .
[7] Giovanni Leone,et al. Inverse scattering under the distorted Born approximation for cylindrical geometries , 1999 .
[8] Romeo Bernini,et al. Information content of the Born field scattered by an embedded slab: multifrequency, multiview, and multifrequency–multiview cases , 1999 .
[9] Kenji Taniguchi,et al. Nondestructive measurement of thickness and carrier concentration of GaAs epitaxial layer using infrared spectroscopic ellipsometry , 1998 .
[10] P. Rosenthal,et al. Model-based analysis for precise and accurate epitaxial silicon measurements , 1998 .
[11] E. Palik. Handbook of Optical Constants of Solids , 1997 .
[12] A. G. Tijhuis,et al. Electromagnetic inverse profiling: Theory and numerical implementation , 1987 .
[13] R. Bernini,et al. An iterative method for optical reconstruction of graded index profiles in planar dielectric waveguides , 2000, Journal of Lightwave Technology.
[14] John A. Woollam,et al. Optical determination of shallow carrier profiles using Fourier transform infrared ellipsometry , 1998 .
[15] Romeo Bernini,et al. Reconstruction of doping profiles in semiconductor materials using optical tomography , 1999 .