A 230MHz CMOS-MEMS bulk acoustic wave resonator

Graphical abstractDisplay Omitted Highlights? In this study the design, fabrication and characterization of a bulk acoustic mode resonator at VHF band is presented. ? The CMOS-MEMS resonator is fabricated using the polysilicon layer of a standard CMOS technology (AMS 0.35µm). ? The resonator is electrostatically actuated and capacitive transduced operating at 230MHz and enhancement with piezoresistive transduction is provided. This contribution reports the design, fabrication and characterization of a bulk acoustic mode resonator at VHF band using the polysilicon layer of a standard CMOS technology (AMS 0.35µm). The resonator is electrostatically actuated and capacitive transduced operating at 230MHz. A discussion on frequency response enhancement with piezoresistive transduction is provided.

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