论文信息 - Reactive ion etching of silicon stencil masks in the presence of an axial magnetic field - 字舞流文

Reactive ion etching of silicon stencil masks in the presence of an axial magnetic field

W. E. Horne | H. R. Rampersad | J. Randall | R. Tiberio | J. Wolfe | M. Morgan | S. Pendharkar | Y.‐L. Chau | D. L. Licon