论文信息 - High-speed epitaxial growth of AlN above 1200∘C by hydride vapor phase epitaxy - 字舞流文

High-speed epitaxial growth of AlN above 1200∘C by hydride vapor phase epitaxy

Toru Nagashima | M. Harada | H. Yanagi | Y. Kumagai | A. Koukitu | K. Takada

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