论文信息 - Monte-Carlo analysis of measurement uncertainties for on-wafer Short-Open-Load-Reciprocal calibrations

Monte-Carlo analysis of measurement uncertainties for on-wafer Short-Open-Load-Reciprocal calibrations

The Short-Open-Load-Reciprocal (SOLR) calibration algorithm is firstly introduced. The formulas of scattering parameters solved by values of calibration standards are derived. Then the Guide to the Expression of Uncertainty in Measurement (GUM) compliant Monte-Carlo method is used to evaluate on-wafer scattering parameters measurement uncertainties.

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