Focused-Ion-Beam Processing for Photonics
暂无分享,去创建一个
[1] Ampere A Tseng,et al. Recent developments in nanofabrication using focused ion beams. , 2005, Small.
[2] Background impurity dependence of redistributions of implanted gallium in silicon during annealing , 1990 .
[3] Andrew A. Bettiol,et al. ION BEAM LITHOGRAPHY AND NANOFABRICATION: A REVIEW , 2005 .
[4] Robert Puers,et al. A review of focused ion beam applications in microsystem technology , 2001 .
[5] Yoshinori Tanaka,et al. Fabrication of Two-Dimensional Photonic Crystal Slab Point-Defect Cavity Employing Local Three-Dimensional Structures , 2006 .
[6] R. Baets,et al. Focused-Ion-Beam Fabrication of Slanted Grating Couplers in Silicon-on-Insulator Waveguides , 2007, IEEE Photonics Technology Letters.
[7] Focused-Ion-Beam Fabricated Vertical Fiber Couplers on Silicon-on-Insulator Waveguides , 2006 .
[8] Siyuan Yu,et al. Focused ion beam-based fabrication of nanostructured photonic devices , 2005, IEEE Journal of Selected Topics in Quantum Electronics.
[9] Ampere A. Tseng,et al. Recent developments in micromilling using focused ion beam technology , 2004 .
[10] H. Ryssel,et al. Defects and gallium-contamination during focused ion beam micro machining , 2000, 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432).
[11] Markus Pollnau,et al. Focused ion beam scan routine, dwell time and dose optimizations for submicrometre period planar photonic crystal components and stamps in silicon , 2007 .
[12] H. Ryssel,et al. Nanoscale effects in focused ion beam processing , 2003 .
[13] M RidderdeRene,et al. Fast prototyping of planar photonic crystal components using a combination of optical lithography and focused ion beam etching , 2005 .
[14] Lucille A. Giannuzzi,et al. Electron backscattering diffraction investigation of focused ion beam surfaces , 2002 .
[15] Focused ion beam fabrication of two dimensional photonic crystals in silicon-on-insulator , 2006 .
[16] Wenbin Hu,et al. Focused Ion Beam Milling Strategies of Photonic Crystal Structures in Silicon , 2007 .
[17] O. Martin,et al. Resonant Optical Antennas , 2005, Science.
[18] E. Bertagnolli,et al. Focused ion beam induced surface amorphization and sputter processes , 2003 .
[19] S. Kalbitzer. Semiconductors for optical memories , 2002 .
[20] Focused-ion-beam fabrication of slanted fiber couplers in silicon-on-insulator waveguides , 2006 .
[21] R. L. Seliger,et al. A high‐intensity scanning ion probe with submicrometer spot size , 1979 .
[22] Maria-Pilar Bernal,et al. Electro-optic effect exaltation on lithium niobate photonic crystals due to slow photons , 2006 .