Slope and amplitude asymmetry effects on low frequency capacitively coupled carbon tetrafluoride plasmas
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E. Schüngel | J. Schulze | Z. Donkó | J. Booth | T. Lafleur | A. Derzsi | E. Johnson | S. Brandt | I. Korolov | B. Bruneau | D. O’Connell | T. Gans | A. Greb
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