Electrostatically Excited Diaphragm Driven As A Loudspeaker

This paper is focused on an hermetically sealed cavity which can be electrostatically excited and driven as a loudspeaker. It contains a description of the actuation principle and some experimental results. A micromachined ultrasonic loudspeaker was fabricated exhibiting 112 dB sound pressure level at 127 kHz and 10 mm away. An empirical Q-value of about 7 was found.

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