Dielectric properties of oxide structures by a laser-based direct-writing method

Matrix-assisted pulsed laser evaporation direct-write (MAPLE-DW) is a laser-based method of directly writing mesoscopic patterns of electronic materials. Patterns of composite BaTiO 3 /SiO 2 /TiO 2 dielectric material were written onto Pt/Au interdigitated-electrode test structures, with precise control over final dielectric properties. Scanning electron microscopy indicates random close-packed structures of BaTiO 3 and SiO 3 particles, with interstitial spaces partially filled with titania. Depending on the BaTiO 3 :silica ratio, the dielectric constant ranged from 5 to 55 and followed a 4-component logarithmic rule of mixing. This work demonstrates that the transfer process and the final material properties of MAPLE-DW oxide materials are largely decoupled.

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