论文信息 - Simmwic Capacitive RF Switches

Simmwic Capacitive RF Switches

Capacitive RF metal membrane switches have been fabricated on pyrex and high-resistivity silicon wafer using CPW transmission lines and a modified air-bridge technology. Actuation voltage down to 25 V has been achieved. The switches exhibit low loss (<0.4 dB @ 35GHz) with good isolation (35 dB @ 35 GHz).

[1] Gabriel M. Rebeiz,et al. Distributed MEMS true-time delay phase shifters and wide-band switches , 1998 .

[2] Elliott R. Brown,et al. RF-MEMS switches for reconfigurable integrated circuits , 1998 .

[3] H. D. L. Santos. Introduction to Microelectromechanical(MEM)Microwave Systems , 1999 .

[4] S. Eshelman,et al. Performance of low-loss RF MEMS capacitive switches , 1998 .

[5] C. Nguyen,et al. Micromechanical electrostatic K-band switches , 1998, 1998 IEEE MTT-S International Microwave Symposium Digest (Cat. No.98CH36192).

[6] M. F. Chang,et al. A Surface Micromachined Miniature Switch For Telecommunications Applications With Signal Frequencies From DC Up To 4 Ghz , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.