An Inchworm Bionic Stepping Actuator Based on PZT/ER Hybrid Dive and Control

An unconventional inchworm stepping actuator based on bionics is presented, which consists of driving unit (PZT stack pump), fluid control unit (ER fluids valve), actuating mechanism (precision hydraulic cylinder). As a new type of precision force/ displacement driving and positioning system, it inherits the advantages of conventional inchworm actuators, and also has its own remarkable characteristics, such as that stepping displacement can be adjusted precisely through varying the working voltage and frequency, etc. The driving unit is actuated jointly by double PZT stacks; Multi-channel parallel cylindrical ER fluids valve is designed as the control valve. In the lab, the inchworm bionic stepping actuator based on PZT/ ER hybrid dive and control is designed and manufactured, and the related performances are testedsystematically. The maximum driving force reaches 49N, and the step size and driving speed VS the working voltage shows a good linear relationship under three different signal waveforms. At the same time, in the frequency range less than 40Hz, the driving speed VS the frequency approximately shows a linear relationship. When working voltage is 100V and rectangle wave signal inputs, the step size reaches 12.6μm. When the working voltage and frequency is 100V, 40Hz, respectively, the driving speed reaches 420μm/s. The maximum drive speed of test prototype reaches 1051 μm/s, when working in frequency 75 Hz. The systematic test shows that the method using PZT and ER hybrid drive and control technology to develop a new type of inchworm bionic stepping actuator is feasible, which provides a reference for the future development of new type of actuator.