A novel miniature interlacing vibrating electric field sensor

The miniature electric field sensor (EFS) presented in this paper consists of substrate, driving structure, shielding electrode and sensing electrode. Compared with its counterparts based on perpendicular and parallel vibrating structures driven by electric force with large driving voltage, the EFS, which employs a novel interlacing vibrating and sensing mode, increases the sensing signal remarkably. By employing piezoelectric ceramics driving structure, we realized a large displacement of the shielding electrode with a lower driving voltage of 2V, therefore reducing the crosstalk significantly. The experimental results show that the novel EFS has good dynamic stability, high S/N ratio and fine resolution of 100 V/m