论文信息 - Low Cross Talk Design and Simple Fabrication Process of Electrostatic Vertical Comb-drive Actuators for Positioning Application - 字舞流文

Low Cross Talk Design and Simple Fabrication Process of Electrostatic Vertical Comb-drive Actuators for Positioning Application

Hiroyuki Fujita | Manabu Ataka | Makoto Mita | M. Zickar

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