论文信息 - Formation of Carbon Layers by the Thermal Decomposition of Carbon Tetrachloride in a Reactor for MOCVD Epitaxy - 字舞流文

Formation of Carbon Layers by the Thermal Decomposition of Carbon Tetrachloride in a Reactor for MOCVD Epitaxy

M. Drozdov | A. Nezhdanov | B. Zvonkov | Y. Danilov | I. Antonov | M. Dorokhin | P. Demina | O. Vikhrova | M. Temiryazeva | A. Zdoroveyshchev | R. N. Kriukov | S. M. Plankina