Long linear MWIR and LWIR HgCdTe arrays for high-resolution imaging

High resolution infrared imaging system calls for very long scanning arrays with several thousands of detectors and high performance. This paper presents the technological developments and the electro-optical performance obtained at LETI/SLIR (Infrared Laboratory) on linear HgCdTe (MCT) arrays working in the 3-5, 8-10 and 11-12.5 micrometers spectral ranges. These large arrays have an indirect hybrid architecture composed of butted HgCdTe PV detection circuits and Si readouts hybridized on a mechanically close-matched fanout substrate. Defect free dicing and butting, respecting the detector pitch, is made by accurate and nondamaging techniques.