Optical emission diagnostics of laser-induced plasma for diamond-like film deposition

Optical emission from a laser-induced plasma plume is recorded during KrF excimer laser ablation of graphite in a gas mixture of Ar and H2 (3%) for deposition of diamond-like thin films. At sub-GW/cm2 laser intensities the spectrum is dominated by the bands of C2 and CN. From the band intensities, the vibrational temperatures of both radicals are calculated to be 12–15×103 K, and their concentrations are estimated to be 5×1014 cm−3 and 2×1014 cm−3, respectively.

[1]  P. Schenck,et al.  Laser vaporization mass spectrometry of refractory materials: Graphite and YBa2Cu3Ox , 1989 .

[2]  M. Costes,et al.  C2 Radicals in a supersonic molecular beam. Radiative lifetime of the d 3Πg state measured by laser-induced fluorescence , 1988 .

[3]  J. Berkowitz,et al.  Mass Spectrometric Study of Vapor Ejected from Graphite and Other Solids by Focused Laser Beams , 1964 .

[4]  G. Herzberg,et al.  Molecular Spectra and Molecular Structure , 1992 .

[5]  R. W. Nicholls,et al.  Transition probability data for seven band systems of C2 , 1976 .

[6]  G. Herzberg.  Molecular Spectra and Molecular Structure IV. Constants of Diatomic Molecules , 1939 .

[7]  R. W. Nicholls,et al.  Intensity measurements on the C2 (d3IIg–a3IIu) Swan band system II. Interpretation of band intensity measurements from synthetic spectra , 1974, Proceedings of the Royal Society of London. A. Mathematical and Physical Sciences.

[8]  W. Wiese,et al.  Critical evaluation of transition probabilities for Ba I and Ba II , 1969 .

[9]  L. DiMauro,et al.  OPTICAL EMISSION STUDIES ON GRAPHITE IN A LASER/VAPORIZATION SUPERSONIC JET CLUSTER SOURCE , 1987 .

[11]  R. T. Demers,et al.  Pulsed Laser Deposition Of Amorphous Carbon Films , 1990, Optics & Photonics.

[12]  R. Honig,et al.  LASER‐INDUCED EMISSION OF ELECTRONS, IONS, AND NEUTRAL ATOMS FROM SOLID SURFACES , 1963 .

[13]  A. Malshe,et al.  Properties of carbon films deposited by pulsed laser vaporization from pyrolytic graphite , 1989 .

[14]  A. G. Gaydon,et al.  The identification of molecular spectra , 1950 .

[15]  D. Santry.  The spectroscopy of flames, 2nd edn. : A.G. Gaydon, Chapman and Hall, London, 1974, pp. xii + 412, price £8.00 , 1976 .

[16]  M. Jeunehomme,et al.  Focused laser-beam experiment and the oscillator strength of the swan system. , 1965 .

[17]  J. R. Stallcop.  Absorption coefficients of a hydrogen plasma for laser radiation , 1974, Journal of Plasma Physics.

[18]  P. Knowles,et al.  The A 2Π–X 2Σ+ red and B 2Σ+–X 2Σ+ violet systems of the CN radical: Accurate multireference configuration interaction calculations of the radiative transition probabilities , 1988 .

[19]  G. Herzberg,et al.  Molecular Spectra and Molecular Structure: I. Spectra of Diatomic Molecules , 1944 .

[20]  O. Wood,et al.  Evolution of a CO2‐laser‐produced cadmium plasma , 1977 .

[21]  I. Constable,et al.  Quantitative measurement of the ablation rate of poly(methyl methacrylate) with 193‐nm excimer laser radiation , 1990 .

[22]  S. Fielding,et al.  Absorption of infra-red radiation as a general technique for the determination of plasma temperature , 1970 .

[23]  S. Langhoff,et al.  Theoretical study of the dissociation energy and the red and violet band systems of CN , 1988 .

[24]  John A. Howe,et al.  Observations on the Maser‐Induced Graphite Jet , 1963 .

[25]  J. Goldsmith,et al.  C2 creation, emission, and laser-induced fluorescence in flames and cold gases , 1990 .

[26]  Jagdish Narayan,et al.  Thin‐film deposition by a new laser ablation and plasma hybrid technique , 1989 .

[27]  W. Duley,et al.  Excimer laser deposition of thin amorphous carbon films , 1989 .

[28]  D. Christen,et al.  Y‐Ba‐Cu‐O thin films grown on rigid and flexible polycrystalline yttria‐stabilized zirconia by pulsed laser ablation , 1990 .

[29]  Eric A. Rohlfing,et al.  Optical emission studies of atomic, molecular, and particulate carbon produced from a laser vaporization cluster source , 1988 .

[30]  J. Mazumder,et al.  Emission spectroscopy of cw CO2 laser‐sustained argon plasma: Effects of gas‐flow speed , 1989 .

[31]  V. Granier,et al.  Ultraviolet laser ablation of polymers: Yield and spatial distribution of products deposition , 1990 .

[32]  E. M. Juengerman,et al.  Diamond‐like carbon films prepared with a laser ion source , 1988 .

[33]  Todd J. Rockstroh,et al.  Spectroscopic studies of plasma during cw laser materials interaction , 1987 .

[34]  H. Stafast,et al.  Evaporation of solids by pulsed laser irradiation , 1989 .

[35]  Wolfgang L. Wiese,et al.  Atomic Transition Probabilities , 1991 .

[36]  H. Kunze,et al.  Laser ablation of zirconium in gas atmospheres at low pressures , 1990 .

[37]  A. G. Gaydon.  The spectroscopy of flames , 1957 .

[38]  R. Dreyfus,et al.  Laser-induced fluorescence study of laser sputtering of graphite , 1987 .

[39]  G. Koren,et al.  Emission spectra and etching of polymers and graphite irradiated by excimer lasers , 1984 .