CAD For Microelectromechanical Systems
暂无分享，去创建一个
CAD Systems for microelectromechanical systems (MEMS) require the three-dimensional and multi-energy- domain modeling of mechanical engineering and the planar mask layout and circuit simulation of integrated circuits. Several CAD systems for MEMS are now under development. Challenges include geometric construction from mask and process data, three-dimensional coupled- energy-domain simulation, construction of lumped macro-models, and computer-aided insertion of those macro-models into dynamical simulators. Examples are given based on the MIT MEMCAD system.
[1] Robert Lewis Reuben,et al. Coupled electrostatic and mechanical FEA of a micromotor , 1994 .
[2] Johannes F. Broenink,et al. Multibond-graph version of the CAMAS modeling and simulation environment , 1991 .
[3] S. Senturia,et al. 3D coupled electro-mechanics for MEMS: applications of CoSolve-EM , 1995, Proceedings IEEE Micro Electro Mechanical Systems. 1995.