Compact modeling of gate sidewall capacitance of DG-MOSFET

Recent studies show that the gate sidewall capacitance of an underlap double gate device plays an important role in the design and optimization of the device. To date, only semiempirical techniques are used to model this important capacitance. In this brief, the authors present an analytical model of the fringe capacitance and find out a geometry dependent quantity which determines the scaling of this capacitance

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